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Little pressure transducer in the whole MEMS trade, no matter design research, or the industry occupies the main status while employing. As to its principle of sensing, press person who hinder, little electric capacity type a little, little resonance type little pressure 3 common form most of transducer nowadays. Among them, it is simplest to press the hindering type structure a little, it is easiest to make craft and step, the shortcoming is that its relevant performance are not so good as its two kinds. Hinder relevant knowledge that MEMS such as effect, deflection theory and other mechanics, electricity involve on the basis of pressing, have designed one to press the hindering type pressure transducer a little.

MEMS pressure sensor in the entire industry, whether it is design research, or industrial applications have dominated. On its sensing principle, the micro-piezoresistive, micro-capacitance, micro-resonant in today's micro-pressure sensor three kinds of the most c