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来源：百度知道 编辑：UC知道 时间：2024/07/04 11:29:12
Abstract
A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.
标题忘记了.......beta.-silicon carbide protective coating and method for fabricating same
这个也要.........
A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.
标题忘记了.......beta.-silicon carbide protective coating and method for fabricating same
这个也要.........
摘要
阿多晶β-碳化硅薄膜或涂层，形成相同的组件，如太阳能电池的顶部，方法，作为一个极其坚硬的保护面，并作为防反射涂层。这直流磁控实现共同的无定形硅和碳溅射，形成一个表面上，如太阳能电池一碳化硅薄膜。薄膜，然后由一个脉冲照射能源，如准分子激光，合成的聚或。mu.c表面上SiC薄膜和生产。测试.--碳化硅。虽然这项发明方法在太阳能电池制造的主要应用，它的应用程序只要有一个极其坚硬的表面要求。
标题忘记了....... beta.，碳化硅保护涂层及制造方法相同
这个也要.........
标题 测试碳化硅保护涂层及制造方法相同
摘要
阿多晶β-碳化硅薄膜或涂层，形成相同的组件，如太阳能电池的顶部，方法，作为一个极其坚硬的保护面，并作为防反射涂层。这是通过直流磁控共同非晶硅和碳溅射，形成一个表面上，如太阳能电池一碳化硅薄膜。薄膜，然后由一个脉冲照射能源，如准分子激光，合成的聚或。mu.c表面上SiC薄膜和生产。测试.--碳化硅。虽然这项发明方法在太阳能电池制造的主要应用，它的应用程序只要有一个极其坚硬的表面要求。
beta. -碳化硅保护涂层和方法相同的摘要，制造多晶硅β-碳化硅薄膜或涂层，形成相同的组件，如太阳能电池的顶部，方法，作为一个极其坚硬的保护面，并作为防反射涂层。这是通过直流磁控共同非晶硅和碳溅射，形成一个表面上，如太阳能电池一碳化硅薄膜。薄膜，然后由一个脉冲照射能源，如准分子激光，合成的聚或。mu.c表面上SiC薄膜和生产。测试.--碳化硅。虽然这项发明方法在太阳能电池制造的主要应用，它的应用程序只要有一个极其坚硬的表面要求。